マグネトロンスパッタによるMo上のカーボン過剰TixC1-x膜の特性と構造
(Properities and structure of carbon Excess TixC1-x Deposited onto Molybdenum by Magnetron Sputtering)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2016-05-24 11:27:19 +0900Updated at: 2018-12-15 00:36:08 +0900