2探針ピエゾ駆動ホルダーを活用した局所領域の精密抵抗測定
(Precise conductivity measurement of sub-micrometered area by using double-probe piezodriving TEM holder)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2016-05-24 16:00:29 +0900 Updated at: 2018-12-14 23:30:26 +0900