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UHV-Bonding and Reversible Interconnection

Author(s)Naoe HOSODA, Tadatomo SUGA, Shingo OBARA, Kichiro IMAGAWA.
Journal titleTRANSACTIONS OF THE JAPAN SOCIETY FOR AERONAUTICAL AND SPACE SCIENCES 49 [166] 197-202
ISSN: 05493811, 13473840
ESI category: ENGINEERING
PublisherJapan Society for Aeronautical and Space Sciences
Year of publication2007
LanguageEnglish
DOIhttps://doi.org/10.2322/tjsass.49.197
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