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Influence of polishing on diamond epitaxial film using vacuum-ultraviolet assisted polishing

C. Inada, S. Toyama, A. Sugamoto, T. Aono, A. Kubota, K. Kasamura, T. Teraji, S. Shikata.
Diamond and Related Materials 152 111901. 2025.
https://doi.org/10.1016/j.diamond.2024.111901

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    Created at: 2025-06-11 03:07:51 +0900 Updated at: 2026-04-21 04:33:11 +0900

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