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Fabrication of a magnesium-ion-conducting magnesium phosphate electrolyte film using atomic layer deposition

Author(s)Tohru Tsuruoka, Takuji Tsujita, Jin Su, Yu Nishitani, Tomofumi Hamamura, Yuu Inatomi, Kensuke Nakura, Kazuya Terabe.
Journal titleJapanese Journal of Applied Physics 59 [SI] SIIG08
ISSN: 13474065, 00214922
ESI category: PHYSICS
PublisherIOP Publishing
Year of publication2020
LanguageEnglish
DOIhttps://doi.org/10.35848/1347-4065/ab79e8
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