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Fabrication of a magnesium-ion-conducting magnesium phosphate electrolyte film using atomic layer deposition

Tohru Tsuruoka, Takuji Tsujita, Jin Su, Yu Nishitani, Tomofumi Hamamura, Yuu Inatomi, Kensuke Nakura, Kazuya Terabe.
Japanese Journal of Applied Physics 59 [SI] SIIG08. 2020.
https://doi.org/10.35848/1347-4065/ab79e8

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