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Realization of closed-loop optimization of epitaxial titanium nitride thin-film growth via machine learning

I. Ohkubo, Z. Hou, J.N. Lee, T. Aizawa, M. Lippmaa, T. Chikyow, K. Tsuda, T. Mori.
Materials Today Physics 16 100296. 2021.
Open Access Elsevier BV (Publisher)

NIMS author(s)


Fulltext and dataset(s) on Materials Data Repository (MDR)


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