SAMURAI - NIMS Researchers Database

HOME > Article > Detail

Realization of closed-loop optimization of epitaxial titanium nitride thin-film growth via machine learning

Author(s)I. Ohkubo, Z. Hou, J.N. Lee, T. Aizawa, M. Lippmaa, T. Chikyow, K. Tsuda, T. Mori.
Journal titleMaterials Today Physics 16 100296
ISSN: 25425293
PublisherElsevier BV
Year of publication2021
Import this reference to MendeleyMendeley

▲ Go to the top of this page