HOME > Article > DetailRealization of closed-loop optimization of epitaxial titanium nitride thin-film growth via machine learningI. Ohkubo, Z. Hou, J.N. Lee, T. Aizawa, M. Lippmaa, T. Chikyow, K. Tsuda, T. Mori. Materials Today Physics 16 100296. 2021.https://doi.org/10.1016/j.mtphys.2020.100296 Open Access Elsevier BV (Publisher) NIMS author(s)OHKUBO, IsaoHOU, ZhufengAIZAWA, TakashiCHIKYO, ToyohiroTSUDA, KojiMORI, TakaoFulltext and dataset(s) on Materials Data Repository (MDR)Created at :2020-11-18 03:00:13 +0900 Updated at :2020-11-18 03:00:34 +0900