Realization of closed-loop optimization of epitaxial titanium nitride thin-film growth via machine learning
| Author(s) | I. Ohkubo, Z. Hou, J.N. Lee, T. Aizawa, M. Lippmaa, T. Chikyow, K. Tsuda, T. Mori. |
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| Journal title | Materials Today Physics 16 100296 ISSN: 25425293 |
| Publisher | Elsevier BV |
| Year of publication | 2021 |
| Language | English |
| DOI | https://doi.org/10.1016/j.mtphys.2020.100296 |
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