HOME > Article > DetailLow-Energy Dissipation Diamond MEMSGuo Chen, Satoshi Koizumi, Yasuo Koide, Meiyong Liao. Accounts of Materials Research 5 [9] 1087-1096. 2024.https://doi.org/10.1021/accountsmr.4c00139 Open Access American Chemical Society (ACS) (Publisher) Materials Data Repository (MDR) NIMS author(s)CHEN, GuoKOIZUMI, SatoshiLIAO, MeiyongFulltext and dataset(s) on Materials Data Repository (MDR)MDRavailable Low-Energy Dissipation Diamond MEMS Created at: 2024-10-12 03:14:01 +0900 Updated at: 2026-04-02 09:00:16 +0900
