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Resistivity Reduction in Very Narrow Cu Wiring
(Resistivity Reduction in Very Narrow CuWiring)

Jin Onuki, Yasushi Sasajima, Kunihiro Tamahashi, YiQing Ke, Shohei Terada, Kishio Hidaka, Shinji Itoh.
Journal of The Electrochemical Society 160 [12] D3266-D3270. 2013.
https://doi.org/10.1149/2.045312jes

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      作成時刻: 2016-05-24 17:29:50 +0900 更新時刻: 2026-03-01 06:20:50 +0900

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