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FIB fabrication and irradiation test of stencil masks for heavy-ion patterned implantation for plasmonic application
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Author(s)B. Zheng, N. Iketa, Y. Takeda, K. Sato, R. Sato, H. Amekura, K. Oyoshi, K. Kono, M.E. Edwards, M. Song, D. Ila, N. Kishimoto, ZHENG, Bangke, IKEDA, Naoki, TAKEDA, Yoshihiko, SATO, Keisuke, SATO, Rodrigo, AMEKURA, Hiroshi, OYOSHI, Keiji, KONO, Kenichiro, M.E. Edwards, HASEGAWA, Akira, D. Ila, KISHIMOTO, Naoki.
Journal titleNUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 272 183-187
ISSN: 0168583X
ESI category: PHYSICS
Publisher
Year of publication2012
LanguageEnglish

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