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FIB fabrication and irradiation test of stencil masks for heavy-ion patterned implantation for plasmonic application
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B. Zheng, N. Iketa, Y. Takeda, K. Sato, R. Sato, H. Amekura, K. Oyoshi, K. Kono, M.E. Edwards, M. Song, D. Ila, N. Kishimoto.

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    Fulltext and dataset(s) on Materials Data Repository (MDR)


      Created at :2016-05-24 16:22:03 +0900 Updated at :2022-09-05 12:56:22 +0900

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