HOME > Article > DetailHomoepitaxial diamond chemical vapor deposition for ultra-light dopingT. Teraji, J. Isoya, K. Watanabe, S. Koizumi, Y. Koide. Materials Science in Semiconductor Processing 70 197-202. 2017.https://doi.org/10.1016/j.mssp.2016.11.012 NIMS author(s)TERAJI, TokuyukiWATANABE, KenjiKOIZUMI, SatoshiKOIDE, YasuoFulltext and dataset(s) on Materials Data Repository (MDR)Created at :2017-08-19 21:55:01 +0900 Updated at :2022-10-22 02:38:37 +0900