AESによるSO2/Si試料表面の電子線照射損傷の定量的評価
(Evaluation of electron irradietion damage on SiO2/Si with AES analysis(Ⅱ))
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2016-05-24 11:51:32 +0900 Updated at: 2018-12-15 00:59:37 +0900