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Spin coherence and depths of single nitrogen-vacancy centers created by ion implantation into diamond via screening masks

Shuntaro Ishizu, Kento Sasaki, Daiki Misonou, Tokuyuki Teraji, Kohei M. Itoh, Eisuke Abe.
Journal of Applied Physics 127 [24] 244502. 2020.
https://doi.org/10.1063/5.0012187

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