Low resistance TiAl ohmic contacts with multi-layered structure for p-type 4H-SiC.
(p型4H-SiCへの多重層構造を持つTiAl低抵抗オーム性電極)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2016-05-24 11:54:34 +0900 Updated at: 2025-05-14 04:15:41 +0900