CDV成長グラフェンを用いたウェハスケールのトランジスタ作製

Shu Nakaharai; Tomohiko Iijima; Shinichi Ogawa; Katsunori Yagi; Naoki Harada; Kenjiro Hayashi; Daiyu Kondo; Makoto Takahashi; Songlin Li; Kazuhito Tsukagoshi; Shintaro Sato; Naoki Yokoyama; Shu Nakaharai; Tomohiko Iijima; Shinichi Ogawa; Katsunori Yagi; Naoki Harada; Kenjiro Hayashi; Daiyu Kondo; Makoto Takahashi; Songlin Li; Kazuhito Tsukagoshi; Shintaro Sato; Naoki Yokoyama

doi:10.7567/jjap.54.04dn06

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Wafer-scale fabrication of transistors using CVD-grown graphene and its application to inverter circuit
(CDV成長グラフェンを用いたウェハスケールのトランジスタ作製)

Shu Nakaharai, Tomohiko Iijima, Shinichi Ogawa, Katsunori Yagi, Naoki Harada, Kenjiro Hayashi, Daiyu Kondo, Makoto Takahashi, Songlin Li, Kazuhito Tsukagoshi, Shintaro Sato, Naoki Yokoyama.

Japanese Journal of Applied Physics 54 [4S] 04DN06. 2015.

https://doi.org/10.7567/jjap.54.04dn06

NIMS著者

Materials Data Repository (MDR)上の本文・データセット

作成時刻: 2016-05-24 17:35:01 +0900 更新時刻: 2025-12-27 05:32:56 +0900

Wafer-scale fabrication of transistors using CVD-grown graphene and its application to inverter circuit(CDV成長グラフェンを用いたウェハスケールのトランジスタ作製)

NIMS著者

Materials Data Repository (MDR)上の本文・データセット

Wafer-scale fabrication of transistors using CVD-grown graphene and its application to inverter circuit
(CDV成長グラフェンを用いたウェハスケールのトランジスタ作製)