Wafer-scale fabrication of transistors using CVD-grown graphene and its application to inverter circuit

Shu Nakaharai; Tomohiko Iijima; Shinichi Ogawa; Katsunori Yagi; Naoki Harada; Kenjiro Hayashi; Daiyu Kondo; Makoto Takahashi; Songlin Li; Kazuhito Tsukagoshi; Shintaro Sato; Naoki Yokoyama; Shu Nakaharai; Tomohiko Iijima; Shinichi Ogawa; Katsunori Yagi; Naoki Harada; Kenjiro Hayashi; Daiyu Kondo; Makoto Takahashi; Songlin Li; Kazuhito Tsukagoshi; Shintaro Sato; Naoki Yokoyama

doi:10.7567/jjap.54.04dn06

Wafer-scale fabrication of transistors using CVD-grown graphene and its application to inverter circuit
(CDV成長グラフェンを用いたウェハスケールのトランジスタ作製)

Shu Nakaharai, Tomohiko Iijima, Shinichi Ogawa, Katsunori Yagi, Naoki Harada, Kenjiro Hayashi, Daiyu Kondo, Makoto Takahashi, Songlin Li, Kazuhito Tsukagoshi, Shintaro Sato, Naoki Yokoyama.

Japanese Journal of Applied Physics 54 [4S] 04DN06. 2015.

https://doi.org/10.7567/jjap.54.04dn06

NIMS author(s)

Fulltext and dataset(s) on Materials Data Repository (MDR)

Created at: 2016-05-24 17:35:01 +0900Updated at: 2024-11-14 05:41:10 +0900

Wafer-scale fabrication of transistors using CVD-grown graphene and its application to inverter circuit(CDV成長グラフェンを用いたウェハスケールのトランジスタ作製)

NIMS author(s)

Fulltext and dataset(s) on Materials Data Repository (MDR)

Wafer-scale fabrication of transistors using CVD-grown graphene and its application to inverter circuit
(CDV成長グラフェンを用いたウェハスケールのトランジスタ作製)