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Measurement of optical constants of Si and SiO2 from reflection electron energy loss spectra using factor analysis method

H. Jin, H. Shinotsuka, H. Yoshikawa, H. Iwai, S. Tanuma, S. Tougaard.
Journal of Applied Physics 107 [8] 083709. 2010.
https://doi.org/10.1063/1.3346345

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