Measurement of optical constants of Si and SiO2 from reflection electron energy loss spectra using factor analysis method | SAMURAI, NIMS Researchers Directory Service

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Measurement of optical constants of Si and SiO2 from reflection electron energy loss spectra using factor analysis method

H. Jin, H. Shinotsuka, H. Yoshikawa, H. Iwai, S. Tanuma, S. Tougaard.

Journal of Applied Physics 107 [8] 083709. 2010.

https://doi.org/10.1063/1.3346345

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Fulltext and dataset(s) on Materials Data Repository (MDR)

Created at: 2016-05-24 16:02:53 +0900Updated at: 2024-09-05 09:30:35 +0900

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