Impact of Sequential N Ion Implantation on Extended Defects and Mg Distribution in Mg Ion‐Implanted GaN

Emi Kano; Jun Uzuhashi; Koki Kobayashi; Kosuke Ishikawa; Kyosuke Sawabe; Tetsuo Narita; Kacper Sierakowski; Michal Bockowski; Tadakatsu Ohkubo; Tetsu Kachi; Nobuyuki Ikarashi; Emi Kano; Jun Uzuhashi; Koki Kobayashi; Kosuke Ishikawa; Kyosuke Sawabe; Tetsuo Narita; Kacper Sierakowski; Michal Bockowski; Tadakatsu Ohkubo; Tetsu Kachi; Nobuyuki Ikarashi

doi:10.1002/pssr.202400074

Impact of Sequential N Ion Implantation on Extended Defects and Mg Distribution in Mg Ion‐Implanted GaN

Emi Kano, Jun Uzuhashi, Koki Kobayashi, Kosuke Ishikawa, Kyosuke Sawabe, Tetsuo Narita, Kacper Sierakowski, Michal Bockowski, Tadakatsu Ohkubo, Tetsu Kachi, Nobuyuki Ikarashi.

physica status solidi (RRL) – Rapid Research Letters 18 [9] 2400074. 2024.

https://doi.org/10.1002/pssr.202400074

Open Access Wiley (Publisher) Materials Data Repository (MDR)

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MDRavailable Impact of Sequential N Ion Implantation on Extended Defects and Mg Distribution in Mg Ion‐Implanted GaN

Created at: 2024-09-06 03:13:48 +0900Updated at: 2024-09-07 03:13:34 +0900