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Micro-Opto-Electro-Mechanical Device Based on Flexible β-Ga2O3 Micro-Lamellas

Author(s)Marco Peres, A. J. S. Fernandes, F. J. Oliveira, L. C. Alves, E. Alves, T. S. Monteiro, S. Cardoso, M. Alonso-Orts, E. Nogales, B. Méndez, E. G. Víllora, K. Shimamura, K. Lorenz.
Journal titleECS Journal of Solid State Science and Technology 8 [7] Q3235-Q3241
ISSN: 21628777, 21628769
ESI category: PHYSICS
PublisherThe Electrochemical Society
Year of publication2019
LanguageEnglish
DOIhttps://doi.org/10.1149/2.0441907jss
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