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AFM/STM複合装置による酸化物粒子の観察の酸化膜の膜厚測定
(Observation of Oxide Particles and Thickness Measurement of Oxide Films by an AFM/STM Hybrid System)

宮原健介, 松岡三郎, 蛭川寿, 長島伸夫, 宮原健介, 松岡三郎, 蛭川寿, 長島伸夫.
日本機械学会論文集　Ａ編 61 [583] 581-588. 1995.

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