Defects in hydrogenated microcrystalline silicon prepared by plasma-enhanced chemical vapour deposition
(プラズマCVD法により作製した微結晶Siにおける欠陥)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2016-05-24 15:51:27 +0900Updated at: 2025-03-11 08:51:26 +0900