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Roles of Hydrogen in Amorphous Oxide Semiconductor In-Ga-Zn-O: Comparison of Conventional and Ultra-High-Vacuum Sputtering

Takaya Miyase, Ken Watanabe, Isao Sakaguchi, Naoki Ohashi, Kay Domen, Kenji Nomura, Hidenori Hiramatsu, Hideya Kumomi, Hideo Hosono, Toshio Kamiya.

NIMS著者


Materials Data Repository (MDR)上の本文・データセット


    作成時刻: 2016-05-24 17:35:07 +0900更新時刻: 2024-09-12 05:12:56 +0900

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