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TEM-EDS with breakthroughs in 3D wiring and high-speed processing

K. Sakai, K. Mitsuda, N. Y. Yamasaki, Y. Takei, R. Yamamoto, T. Hara, K. Maehata, N. Iyomoto, K. Tanaka.
Journal of Low Temperature Physics 167 [5-6] 759-764. 2012.

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