シリコン酸化膜成長過程の表面応力変動
(Surface Stress in the Growth of Silicon Oxide Layer)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2022-09-05 10:56:19 +0900 Updated at: 2022-09-05 10:56:19 +0900