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In situ characterization of Mn and Fe silicide islands on silicon
(Si上Mn及びFeシリサイドのin-situ評価)

Miyoko Tanaka, Qi Zhang, Masaki Takeguchi, Kazuo Furuya.
Surface Science 532-535 946-951. 2003.
https://doi.org/10.1016/s0039-6028(03)00213-9

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      Created at: 2016-05-24 11:47:18 +0900 Updated at: 2025-06-22 06:03:03 +0900

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