Low-pass secondary electron detector for outlens scanning electron microscopy | SAMURAI, NIMS Researchers Directory Service

HOME > Article > Detail

Low-pass secondary electron detector for outlens scanning electron microscopy
(Low-pass secondary electron detector for outlens scanning electron microscope)

Takashi Sekiguchi, Hideo Iwai.

Japanese Journal of Applied Physics 54 [8] 088001. 2015.

https://doi.org/10.7567/jjap.54.088001

NIMS author(s)

IWAI, Hideo

Fulltext and dataset(s) on Materials Data Repository (MDR)

Created at: 2016-05-24 17:54:28 +0900Updated at: 2024-04-01 23:26:12 +0900

▲ Go to the top of this page