Vacancy clusters introduced by CF4-based plasma treatment in GaN probed with a monoenergetic positron beam

Akira Uedono; Nakaaki Yoshihara; Yuhao Zhang; Min Sun; Daniel Piedra; Tatsuya Fujishima; Shoji Ishibashi; Masatomo Sumiya; Oleg Laboutin; Wayne Johnson; Tomás Palacios

doi:10.7567/apex.7.121001

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Vacancy clusters introduced by CF4-based plasma treatment in GaN probed with a monoenergetic positron beam

Akira Uedono, Nakaaki Yoshihara, Yuhao Zhang, Min Sun, Daniel Piedra, Tatsuya Fujishima, Shoji Ishibashi, Masatomo Sumiya, Oleg Laboutin, Wayne Johnson, Tomás Palacios.

Applied Physics Express 7 [12] 121001. 2014.

https://doi.org/10.7567/apex.7.121001

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角谷正友

Materials Data Repository (MDR)上の本文・データセット

作成時刻: 2016-05-24 17:44:48 +0900更新時刻: 2024-04-01 23:13:40 +0900