Vacancy clusters introduced by CF4-based plasma treatment in GaN probed with a monoenergetic positron beam

Akira Uedono; Nakaaki Yoshihara; Yuhao Zhang; Min Sun; Daniel Piedra; Tatsuya Fujishima; Shoji Ishibashi; Masatomo Sumiya; Oleg Laboutin; Wayne Johnson; Tomás Palacios; Akira Uedono; Nakaaki Yoshihara; Yuhao Zhang; Min Sun; Daniel Piedra; Tatsuya Fujishima; Shoji Ishibashi; Masatomo Sumiya; Oleg Laboutin; Wayne Johnson; Tomás Palacios

doi:10.7567/apex.7.121001

Vacancy clusters introduced by CF4-based plasma treatment in GaN probed with a monoenergetic positron beam

Akira Uedono, Nakaaki Yoshihara, Yuhao Zhang, Min Sun, Daniel Piedra, Tatsuya Fujishima, Shoji Ishibashi, Masatomo Sumiya, Oleg Laboutin, Wayne Johnson, Tomás Palacios.

Applied Physics Express 7 [12] 121001. 2014.

https://doi.org/10.7567/apex.7.121001

NIMS author(s)

SUMIYA, Masatomo

Fulltext and dataset(s) on Materials Data Repository (MDR)

Created at: 2016-05-24 17:44:48 +0900Updated at: 2024-04-01 23:13:40 +0900