Vacancy clusters introduced by CF4-based plasma treatment in GaN probed with a monoenergetic positron beam
Author(s) | Akira Uedono, Nakaaki Yoshihara, Yuhao Zhang, Min Sun, Daniel Piedra, Tatsuya Fujishima, Shoji Ishibashi, Masatomo Sumiya, Oleg Laboutin, Wayne Johnson, Tomás Palacios. |
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Journal title | Applied Physics Express 7 [12] 121001 ISSN: 18820786, 09538984, 18820778 ESI category: PHYSICS |
Publisher | Japan Society of Applied Physics |
Year of publication | 2014 |
Language | English |
DOI | https://doi.org/10.7567/apex.7.121001 |
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