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Vacancy clusters introduced by CF4-based plasma treatment in GaN probed with a monoenergetic positron beam

Author(s)Akira Uedono, Nakaaki Yoshihara, Yuhao Zhang, Min Sun, Daniel Piedra, Tatsuya Fujishima, Shoji Ishibashi, Masatomo Sumiya, Oleg Laboutin, Wayne Johnson, Tomás Palacios.
Journal titleApplied Physics Express 7 [12] 121001
ISSN: 18820786, 18820778, 09538984
ESI category: PHYSICS
PublisherJapan Society of Applied Physics
Year of publication2014
LanguageEnglish
DOIhttps://doi.org/10.7567/apex.7.121001
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