In-situ determination of the Carrier Concentration by Reflectance Anisotropy Spectroscopy
(その場反射率差分分光法によるIII-V族半導体の表面と不純物測定)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2022-09-05 11:07:02 +0900 Updated at: 2022-09-05 11:07:02 +0900