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Optical and electrical properties of silicon-implanted α-Al<sub>2</sub>O<sub>3</sub>

Author(s)Hironori Okumura, Riena Jinno, Akira Uedono, Masataka Imura.
Journal titleJapanese Journal of Applied Physics 60 [10] 106502
ISSN: 13474065, 00214922
ESI category: PHYSICS
PublisherIOP Publishing
Year of publication2021
LanguageEnglish
DOIhttps://doi.org/10.35848/1347-4065/ac21af
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