Optical and electrical properties of silicon-implanted α-Al<sub>2</sub>O<sub>3</sub>
Author(s) | Hironori Okumura, Riena Jinno, Akira Uedono, Masataka Imura. |
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Journal title | Japanese Journal of Applied Physics 60 [10] 106502 ISSN: 13474065, 00214922 ESI category: PHYSICS |
Publisher | IOP Publishing |
Year of publication | 2021 |
Language | English |
DOI | https://doi.org/10.35848/1347-4065/ac21af |
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