A High-Current Negative-Ion Implanter and its Application for Nanocrystal Fabrication in Insulators
(大電流負イオン注入装置およびその絶縁体中ナノ結晶生成への応用)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2022-11-15 00:39:20 +0900Updated at: 2022-11-15 00:39:20 +0900