3D impurity profiles of doped/intrinsic amorphous-silicon layers composing textured silicon heterojunction solar cells detected by atom probe tomography

Yasuo Shimizu; Bin Han; Naoki Ebisawa; Yoshinari Ichihashi; Taiki Hashiguchi; Hirotaka Katayama; Mitsuhiro Matsumoto; Akira Terakawa; Koji Inoue; Yasuyoshi Nagai; Yasuo Shimizu; Bin Han; Naoki Ebisawa; Yoshinari Ichihashi; Taiki Hashiguchi; Hirotaka Katayama; Mitsuhiro Matsumoto; Akira Terakawa; Koji Inoue; Yasuyoshi Nagai

doi:10.35848/1882-0786/abcd70

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3D impurity profiles of doped/intrinsic amorphous-silicon layers composing textured silicon heterojunction solar cells detected by atom probe tomography

Yasuo Shimizu, Bin Han, Naoki Ebisawa, Yoshinari Ichihashi, Taiki Hashiguchi, Hirotaka Katayama, Mitsuhiro Matsumoto, Akira Terakawa, Koji Inoue, Yasuyoshi Nagai.

Applied Physics Express 13 [12] 126503. 2020.

https://doi.org/10.35848/1882-0786/abcd70

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作成時刻: 2020-12-15 03:00:16 +0900 更新時刻: 2026-05-02 04:59:33 +0900