HOME > Article > DetailDefect Characterization in Silicon by Electron-Beam-Induced Current and Cathodoluminescence TechniquesSEKIGUCHI, Takashi, CHEN, Jun. Defects and Impurities in Silicon Materials: An Introduction to Atomic-Level Silicon Engineering 946 343-373. 2016.NIMS author(s)CHEN, JunFulltext and dataset(s) on Materials Data Repository (MDR)Created at :2017-12-09 20:10:14 +0900 Updated at :2018-06-15 22:24:34 +0900