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SIMSによるB下地層を有するSiC/Mo材料のB拡散の直接観察
(Direct Pbservation of Boron Diffusion Using Secondary Ion Mass Spectrometry for Sic coated Mo with a Boron Underlayer)

北島正弘, 福富勝夫, 岡田雅年, Kitajima M., Fukutomi M., Okada M..
Thin Solid Films 105 [4] 325-330. 1983.

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      Created at: 2016-05-24 11:27:14 +0900 Updated at: 2026-04-26 05:10:46 +0900

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