マグネトロンスパッタによるTiC被覆Moの機械的性質
(Mechanical Behavior of Tic Film Coated on Mo by Magnetron Sputtering)
NIMS author(s)
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Created at :2016-05-24 11:27:19 +0900 Updated at :2020-11-16 23:00:32 +0900