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Electrical properties of atomic layer deposited HfO2/Al2O3 multilayer on diamond

Jiangwei Liu, Meiyong Liao, Masataka Imura, Hirotaka Oosato, Eiichiro Watanabe, Yasuo Koide.

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    Fulltext and dataset(s) on Materials Data Repository (MDR)


      Created at: 2016-05-24 17:34:34 +0900 Updated at: 2026-05-03 05:54:07 +0900

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