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Development of a TES microcalorimeter with a mushroom shaped absorber deposited on an insulating layer in an overhang region

K. Maehata, N. Iyomoto, T. Yasumune, M. Maeda, S. Matsumura, T. Hara, K. Mitsuda, N. Yamasaki, K. Tanaka.
Journal of Low Temperature Physics 167 [3-4] 226-231. 2012.
https://doi.org/10.1007/s10909-012-0469-y

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