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Microfabrication of GaN groove on sapphire substrate treated selectively by electron beam
(サファイア基板の電子線処理によるGaNマイクロ溝の形成)

H. Matsumura, M. Sumiya, Y. Kawai, M. Tomiki, K. Murakami, S. Fuke.
physica status solidi (c) 3 [6] 1649-1652. 2006.

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    Created at :2016-05-24 15:08:28 +0900 Updated at :2020-11-16 22:28:13 +0900

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