HOME > Article > DetailMicrofabrication of GaN groove on sapphire substrate treated selectively by electron beam(サファイア基板の電子線処理によるGaNマイクロ溝の形成)H. Matsumura, M. Sumiya, Y. Kawai, M. Tomiki, K. Murakami, S. Fuke. physica status solidi (c) 3 [6] 1649-1652. 2006.https://doi.org/10.1002/pssc.200565409 NIMS author(s)SUMIYA, MasatomoFulltext and dataset(s) on Materials Data Repository (MDR)Created at :2016-05-24 15:08:28 +0900 Updated at :2020-11-16 22:28:13 +0900