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English Translation of J. Surf. Anal. 24, 192-205(2018), Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam
(翻訳,極低角度入射ビームオージェ深さ方向分析によるHfO2/Si基板の分析)

Journal of Surface Analysis [3] 209-220. 2019.

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    Created at :2019-04-03 03:00:19 +0900 Updated at :2019-05-10 18:56:07 +0900

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