HOME > Article > DetailTemplate-Assisted Nano-Patterning from Submicron-Scale to Submolecular-LevelKatsuhiko Ariga. Journal of Nanoscience and Nanotechnology 4 [1] 23-34. 2004.https://doi.org/10.1166/jnn.2004.048 NIMS author(s)ARIGA, KatsuhikoFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2016-05-24 12:02:31 +0900 Updated at: 2025-05-15 05:12:23 +0900