HOME > Article > DetailDirect milling of 25 nm in diameter gold and graphene nanogears by a focused He+ ion beamMakoto Sakurai, Shoko Nagano, Christian Joachim. Vacuum 207 111605. 2023.https://doi.org/10.1016/j.vacuum.2022.111605 NIMS author(s)SAKURAI, MakotoNAGANO, ShokoFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2022-10-28 03:27:05 +0900Updated at: 2025-03-11 08:28:17 +0900