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Kinetic study on the hydrogen atom-induced abstraction and associative desorption of deuterium adatoms from the Si(100) surface

S. Shimokawa, A. Namiki, ANDO, Toshihiro, Y. Sato, J. Lee, S. Shimokawa, A. Namiki, Y. Sato, J. Lee.
The Journal of Chemical Physics 112 [1] 356-365. 2000.
https://doi.org/10.1063/1.480586

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