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Determining electron inelastic mean free paths by iterative Monte Carlo analysis of the backscattered electron spectrum

Jiamin Gong, Lihao Yang, Hideki Yoshikawa, Shigeo Tanuma, Bo Da, Chuanhong Jin, Zejun Ding.

Journal of Applied Physics 138 [19] 195301. 2025.

https://doi.org/10.1063/5.0302645

Open Access AIP Publishing (Publisher) Materials Data Repository (MDR)

NIMS author(s)

YOSHIKAWA, Hideki

Fulltext and dataset(s) on Materials Data Repository (MDR)

MDRavailable Determining electron inelastic mean free paths by iterative Monte Carlo analysis of the backscattered electron spectrum

Created at: 2025-12-16 03:09:34 +0900 Updated at: 2026-04-20 04:32:48 +0900

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