Nitrogen Plasma Enhanced Low Temperature Atomic Layer Deposition of Magnesium Phosphorus Oxynitride (MgPON) Solid‐State Electrolytes
| Author(s) | SU, Jin, TSURUOKA, Tohru, Takuji Tsujita, Yuu Inatomi, TERABE, Kazuya, Takuji Tsujita, Yuu Inatomi. |
|---|---|
| Journal title | Angewandte Chemie International Edition 62 [9] ISSN: 00448249, 15213773, 14337851 ESI category: CHEMISTRY |
| Publisher | Wiley |
| Year of publication | 2023 |
| Language | English |
| DOI | https://doi.org/10.1002/anie.202217203 |
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