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Nitrogen Plasma Enhanced Low Temperature Atomic Layer Deposition of Magnesium Phosphorus Oxynitride (MgPON) Solid‐State Electrolytes

Jin Su, Tohru Tsuruoka, Takuji Tsujita, Yuu Inatomi, Kazuya Terabe.

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Fulltext and dataset(s) on Materials Data Repository (MDR)

    Created at: 2023-03-10 03:39:26 +0900Updated at: 2024-06-02 08:44:37 +0900

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