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4H-SiC Surface Structures and Oxidation Mechanism Revealed by Using First-Principles and Classical Molecular Dynamics Simulations

著者Takahiro Yamasaki, Nobuo Tajima, Tomoaki Kaneko, Nobutaka Nishikawa, Jun Nara, Tatsuo Schimizu, Koichi Kato, Takahisa Ohno.
掲載誌名Materials Science Forum 858 429-432
ISSN: 16629752
出版社Trans Tech Publications
発表年2016
言語English
DOIhttps://doi.org/10.4028/www.scientific.net/msf.858.429
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