Cathodoluminescence and EBIC study of twist and tilt boundaries in bonded silicon wafers
(カソードルミネッセンス・EBICによる貼り合せシリコンウエハの傾斜、傾角粒界の研究)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2022-11-15 00:40:18 +0900 Updated at: 2022-11-15 00:40:18 +0900