HOME > Article > DetailPerspective: Highly ordered MoS2 thin films grown by multi-step chemical vapor deposition process(CVD法による高配向MoS2薄膜の成長)S. N. Heo, Y. Ishiguro, R. Hayakawa, T. Chikyow, Y. Wakayama. APL Materials 4 [3] 030901. 2016.https://doi.org/10.1063/1.4943288 Open Access AIP Publishing (Publisher) NIMS author(s)HAYAKAWA, RyomaCHIKYO, ToyohiroWAKAYAMA, YutakaFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2016-10-26 15:42:35 +0900Updated at: 2024-03-29 19:11:40 +0900