HOME > Article > DetailResolving lateral and vertical structures by ellipsometry using wavelength range scanP. Petrik, E. Agocs, J. Volk, I. Lukacs, B. Fodor, P. Kozma, T. Lohner, S. Oh, Y. Wakayama, T. Nagata, M. Fried. Thin Solid Films 571 579-583. 2014.https://doi.org/10.1016/j.tsf.2014.02.008 NIMS author(s)WAKAYAMA, YutakaNAGATA, TakahiroFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2016-05-24 17:40:46 +0900Updated at: 2024-03-31 13:17:23 +0900
