HOME > Article > Detail極低角度入射イオンビームを用いたオージェ深さ方向分析によるFeNi/CoFeB/FeNi多層薄膜の分析(Auger Depth Profiling Analysis of FeNi/CoFeB/FeNi Specimen Using an Ultra Low Angle Incidence Ion Beam)荻原 俊弥, 柳内 克昭, 吉川 英樹. Journal of Surface Analysis 25 [1] 14-20. 2018.https://doi.org/10.1384/jsa.25.14 Open Access 一般社団法人 表面分析研究会 (Publisher) Materials Data Repository (MDR) NIMS author(s)OGIWARA, ToshiyaYOSHIKAWA, HidekiFulltext and dataset(s) on Materials Data Repository (MDR)MDRavailable Auger Depth Profiling Analysis of FeNi/CoFeB/FeNi Specimen Using an Ultra Low Angle Incidence Ion Beam Created at :2019-03-01 12:15:23 +0900 Updated at :2021-12-24 01:02:44 +0900