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極低角度入射イオンビームを用いたオージェ深さ方向分析によるFeNi/CoFeB/FeNi多層薄膜の分析
(Auger Depth Profiling Analysis of FeNi/CoFeB/FeNi Specimen Using an Ultra Low Angle Incidence Ion Beam)

荻原 俊弥, 柳内 克昭, 吉川 英樹.
Journal of Surface Analysis 25 [1] 14-20. 2018.

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Created at :2019-03-01 12:15:23 +0900 Updated at :2021-12-24 01:02:44 +0900

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