Effects of Carbon Contaminations on Electron-Induced Damage of SiO2 Film Surface at Different Electron Primary Energies | SAMURAI, NIMS Researchers Directory Service

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Effects of Carbon Contaminations on Electron-Induced Damage of SiO2 Film Surface at Different Electron Primary Energies

T. Nagatomi, H. Nakamura, Y. Takai, T. Ogiwara, T. Kimura, S. Tanuma.

Journal of Surface Analysis 18 [1] 26-35. 2011.

https://doi.org/10.1384/jsa.18.26

NIMS author(s)

OGIWARA, Toshiya

Fulltext and dataset(s) on Materials Data Repository (MDR)

Created at: 2016-05-24 16:27:03 +0900 Updated at: 2026-07-28 04:53:35 +0900

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