Development of automated tip preparation for atom probe tomography by using script-controlled FIB-SEM | SAMURAI, NIMS Researchers Directory Service

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Development of automated tip preparation for atom probe tomography by using script-controlled FIB-SEM

Jun Uzuhashi, Tadakatsu Ohkubo, Kazuhiro Hono.

Ultramicroscopy 247 113704. 2023.

https://doi.org/10.1016/j.ultramic.2023.113704

Open Access Elsevier BV (Publisher) Materials Data Repository (MDR)

NIMS author(s)

Fulltext and dataset(s) on Materials Data Repository (MDR)

MDRavailable Development of automated tip preparation for atom probe tomography by using script-controlled FIB-SEM

Created at: 2023-02-24 17:19:23 +0900 Updated at: 2025-05-21 05:30:23 +0900

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